Title of article
A ball-indentation method to evaluate the critical stress for dislocation generation in a silicon substrate
Author/Authors
H. Ohta، نويسنده , , S. Kida and H. Miura، نويسنده , , M. Kitano، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
8
From page
877
To page
884
Keywords
etch-pit , Ion implantation , semiconductor device , silicon. , Dislocation
Journal title
Fatigue and Fracture of Engineering Materials and Structures
Serial Year
2001
Journal title
Fatigue and Fracture of Engineering Materials and Structures
Record number
359488
Link To Document