Title of article :
Characterization of structural films using microelectromechanical resonators
Author/Authors :
C. L. MUHLSTEIN، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Keywords :
Fatigue , reaction-layer fatigue , Silicon , thin films.
Journal title :
Fatigue and Fracture of Engineering Materials and Structures
Journal title :
Fatigue and Fracture of Engineering Materials and Structures
