Title of article :
Amorphous Mo–N and Mo–Si–N films in microelectromechanical systems
Author/Authors :
H. KATTELUS، نويسنده , , M. YLONEN، نويسنده , , M. BLOMBERG، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
7
From page :
743
To page :
749
Keywords :
amorphousmetals , Mo–N , Mo–Si–N , nanoindentation. , metallic micromachining
Journal title :
Fatigue and Fracture of Engineering Materials and Structures
Serial Year :
2005
Journal title :
Fatigue and Fracture of Engineering Materials and Structures
Record number :
359876
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=359876
بازگشت