• Title of article

    Characterization of strength properties of thin polycrystalline silicon films for MEMS applications

  • Author/Authors

    R. Boroch، نويسنده , , J. Wiaranowski، نويسنده , , R. Mueller-Fiedler، نويسنده , , M. Ebert، نويسنده , , J. Bagdahn، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2007
  • Pages
    11
  • From page
    2
  • To page
    12
  • Keywords
    Fracture strength , Polysilicon , strength prediction , Weibull distribution
  • Journal title
    Fatigue and Fracture of Engineering Materials and Structures
  • Serial Year
    2007
  • Journal title
    Fatigue and Fracture of Engineering Materials and Structures
  • Record number

    360003

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=360003