Title of article :
The role of debris-induced cantilever effects in cyclic fatigue of micron-scale silicon films
Author/Authors :
O. N. PIERRON، نويسنده , , C. L. MUHLSTEIN، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Keywords :
cantilever effect , Fatigue , MEMS , reaction-layer fatigue , silicon.
Journal title :
Fatigue and Fracture of Engineering Materials and Structures
Journal title :
Fatigue and Fracture of Engineering Materials and Structures
