Title of article

Stiction and anti-stiction in MEMS and NEMS

Author/Authors

Zhao Yapu ، نويسنده ,

Issue Information

روزنامه با شماره پیاپی سال 2003

Pages

10

From page

1

To page

10

Keywords

MEMS , anti-stiction , stiction , work of adhesion , self-assembled monolayer (SAM

Journal title

Acta Mechanica Sinica

Serial Year

2003

Journal title

Acta Mechanica Sinica

Record number

360363