مرکز منطقه ای اطلاع رساني علوم و فناوري - Design, fabrication, testing and mechanical analysis of bulk-micromachined flowmeters

Title of article :

Design, fabrication, testing and mechanical analysis of bulk-micromachined flowmeters

Author/Authors :

Wang Xiaobao، نويسنده , , Qian Jin ، نويسنده , , Zhang Dacheng ، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2004

Pages :

From page :

152

To page :

158

Keywords :

bulk-micromachining , Piezoresistivity , Wheatstone bridge , micromachined flowmeters

Journal title :

Acta Mechanica Sinica

Serial Year :

2004

Journal title :

Acta Mechanica Sinica

Record number :

360444

Link To Document :