• Title of article

    Design, fabrication, testing and mechanical analysis of bulk-micromachined flowmeters

  • Author/Authors

    Wang Xiaobao، نويسنده , , Qian Jin ، نويسنده , , Zhang Dacheng ، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2004
  • Pages
    7
  • From page
    152
  • To page
    158
  • Keywords
    bulk-micromachining , Piezoresistivity , Wheatstone bridge , micromachined flowmeters
  • Journal title
    Acta Mechanica Sinica
  • Serial Year
    2004
  • Journal title
    Acta Mechanica Sinica
  • Record number

    360444