Title of article :
A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication
Author/Authors :
Ge Yang، نويسنده , , James A. Gaines and Bradley J. Nelson ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Pages :
26
From page :
43
To page :
68
Keywords :
hybrid MEMS , MEMS fabrication. , Microassembly , microrobotics , microgripper design , computer vision
Journal title :
Journal of Intelligent and Robotic Systems
Serial Year :
2003
Journal title :
Journal of Intelligent and Robotic Systems
Record number :
361717
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=361717
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