• Title of article

    The Atomic Limit of Finite Element Modeling in MEMS: Coupling of Length Scales

  • Author/Authors

    Robert E. Rudd، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2001
  • Pages
    10
  • From page
    17
  • To page
    26
  • Keywords
    silicon resonator , Finite elements , Molecular dynamics , coupling of length scales , MEMS
  • Journal title
    Analog Integrated Circuits and Signal Processing
  • Serial Year
    2001
  • Journal title
    Analog Integrated Circuits and Signal Processing
  • Record number

    367176

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=367176