Title of article :
Increasing the Dynamic Range of a Micromechanical Moving-Plate Capacitor
Author/Authors :
J. M. Kyyn?r?inen، نويسنده , , A. S. Oja and H. Sepp? ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Pages :
10
From page :
61
To page :
70
Keywords :
micromechanical capacitor , Electrostatic actuation
Journal title :
Analog Integrated Circuits and Signal Processing
Serial Year :
2001
Journal title :
Analog Integrated Circuits and Signal Processing
Record number :
367180
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=367180
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