Title of article
Microbeams with Electronically Controlled High Thermal Impedance
Author/Authors
S. S. Mir ، نويسنده , , F. Parrain، نويسنده , , B. Charlot and D. Veychard ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
13
From page
71
To page
83
Keywords
CMOS switched-capacitor circuits , anisotropic etching , thermal MEMS
Journal title
Analog Integrated Circuits and Signal Processing
Serial Year
2001
Journal title
Analog Integrated Circuits and Signal Processing
Record number
367181
Link To Document