Title of article :
Microbeams with Electronically Controlled High Thermal Impedance
Author/Authors :
S. S. Mir ، نويسنده , , F. Parrain، نويسنده , , B. Charlot and D. Veychard ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Pages :
13
From page :
71
To page :
83
Keywords :
CMOS switched-capacitor circuits , anisotropic etching , thermal MEMS
Journal title :
Analog Integrated Circuits and Signal Processing
Serial Year :
2001
Journal title :
Analog Integrated Circuits and Signal Processing
Record number :
367181
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=367181
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