Title of article :
Modelling and Experiment of a Silicon Resonant Pressure Sensor
Author/Authors :
Zheng Cui، نويسنده , , Deyong Chen and Shanhong Xia ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2002
Pages :
7
From page :
29
To page :
35
Keywords :
computer simulation , MEMS design , pressure sensor , silicon resonator
Journal title :
Analog Integrated Circuits and Signal Processing
Serial Year :
2002
Journal title :
Analog Integrated Circuits and Signal Processing
Record number :
367250
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=367250
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