First Harmonic (2f) Characterisation of Resonant Frequency and Q-Factor of Micromechanical Transducers

V.J. Logeeswaran، نويسنده , , F.E.H. Tay، نويسنده , , M.L. Chan، نويسنده , , F.S. Chau and Y.C. Liang ، نويسنده ,

روزنامه با شماره پیاپی سال 2003

17

17

33

resonance curvearea (RCA) , electrostatic drive , Lorentzian curve-fitting , experimental modal analysis , lock-in technique , first harmonic (2 f )

Analog Integrated Circuits and Signal Processing

2003

Analog Integrated Circuits and Signal Processing

367378