Title of article
A Frequency Selective Silicon Vibration Sensor with Direct Electrostatic Stiffness Modulation
Author/Authors
Dirk Scheibner، نويسنده , , Jürgen Wibbeler، نويسنده , , Jan Mehner، نويسنده , , Birgit Br?mer، نويسنده , , Thomas Gessner and Wolfram D?tzel ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
9
From page
35
To page
43
Keywords
Vibration , frequency tuning , SCREAM , Array , resonant
Journal title
Analog Integrated Circuits and Signal Processing
Serial Year
2003
Journal title
Analog Integrated Circuits and Signal Processing
Record number
367379
Link To Document