• Title of article

    A Frequency Selective Silicon Vibration Sensor with Direct Electrostatic Stiffness Modulation

  • Author/Authors

    Dirk Scheibner، نويسنده , , Jürgen Wibbeler، نويسنده , , Jan Mehner، نويسنده , , Birgit Br?mer، نويسنده , , Thomas Gessner and Wolfram D?tzel ، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2003
  • Pages
    9
  • From page
    35
  • To page
    43
  • Keywords
    Vibration , frequency tuning , SCREAM , Array , resonant
  • Journal title
    Analog Integrated Circuits and Signal Processing
  • Serial Year
    2003
  • Journal title
    Analog Integrated Circuits and Signal Processing
  • Record number

    367379