Title of article :
Neural Network Approach for Linearization of the Electrostatically Actuated Double-Gimballed Micromirror
Author/Authors :
Guangya Zhou، نويسنده , , Kelvin K.L. Cheo، نويسنده , , Francis E.H. Tay and Fook Siong Chau ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Keywords :
MEMS , micromirror and macro modeling , Optical MEMS
Journal title :
Analog Integrated Circuits and Signal Processing
Journal title :
Analog Integrated Circuits and Signal Processing