Title of article :
Modeling and Prediction of the Dynamic Behaviour of Microbeams Under Electrostatic Load
Author/Authors :
Eugenio Brusa، نويسنده , , Francesco De Bona، نويسنده , , Antonio Gugliotta and Aurelio Somà ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Pages :
10
From page :
155
To page :
164
Keywords :
MEMS , microbeams , structural dynamics , Electrostatic actuation , Finite element method
Journal title :
Analog Integrated Circuits and Signal Processing
Serial Year :
2004
Journal title :
Analog Integrated Circuits and Signal Processing
Record number :
367432
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=367432
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