Title of article
Dose control circuit for digital electrostatic electron-beam array lithography
Author/Authors
Chandra Sekhar A. Durisety، نويسنده , , Rajagopal Vijayraghavan، نويسنده , , Lakshmipriya Seshan، نويسنده , , Syed K. Islam and Benjamin J. Blalock ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
8
From page
143
To page
150
Keywords
CNF . Dose control circuit . DCC . Integrator .Lithography . Mask-less lithography . Photolithography
Journal title
Analog Integrated Circuits and Signal Processing
Serial Year
2006
Journal title
Analog Integrated Circuits and Signal Processing
Record number
367667
Link To Document