• Title of article

    Optimization of lithographic masks using genetic algorithms

  • Author/Authors

    U. Triltsch، نويسنده , , A. Phataralaoha، نويسنده , , M. I. Kilani and S. Buttgenbach ، نويسنده , , D. Straube and H. -J. Franke ، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2006
  • Pages
    8
  • From page
    49
  • To page
    56
  • Keywords
    Genetic algorithms . Lithography . Anisotropicetching . Bulk-micro-machining . Tactile sensor
  • Journal title
    Analog Integrated Circuits and Signal Processing
  • Serial Year
    2006
  • Journal title
    Analog Integrated Circuits and Signal Processing
  • Record number

    367676

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=367676