مرکز منطقه ای اطلاع رساني علوم و فناوري - A new formulation of fringing capacitance and its application to the control of parallel-plate electrostatic micro actuators

Title of article :

A new formulation of fringing capacitance and its application to the control of parallel-plate electrostatic micro actuators

Author/Authors :

Mehran Hosseini، نويسنده , , Guchuan Zhu and Yves-Alain Peter ، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2007

Pages :

From page :

119

To page :

128

Keywords :

Fringing field effect Modeling ofelectrostatic MEMS FEM based simulation Input-to-state stabilization Robust nonlinear control

Journal title :

Analog Integrated Circuits and Signal Processing

Serial Year :

2007

Journal title :

Analog Integrated Circuits and Signal Processing

Record number :

367799

Link To Document :