مرکز منطقه ای اطلاع رساني علوم و فناوري - Model of electrostatic actuated deformable mirror using strongly coupled electro-mechanical finite element

Title of article :

Model of electrostatic actuated deformable mirror using strongly coupled electro-mechanical finite element

Author/Authors :

Veronique Rochus، نويسنده , , Jean-Claude Golinval، نويسنده , , Christophe Louis، نويسنده , , Carlos Mendez and Igor Klapka ، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2007

Pages :

From page :

129

To page :

135

Keywords :

Electro-mechanical coupling Micro-mirrors Finite element modelling

Journal title :

Analog Integrated Circuits and Signal Processing

Serial Year :

2007

Journal title :

Analog Integrated Circuits and Signal Processing

Record number :

367800

Link To Document :