Title of article :
Reduced-order modelling of the bending of an array of torsional micromirrors
Author/Authors :
A. Molfese، نويسنده , , A. Nannini and F. Pieri ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Keywords :
Micromirrors . MEMS modelling . FEMsimulation
Journal title :
Analog Integrated Circuits and Signal Processing
Journal title :
Analog Integrated Circuits and Signal Processing