Title of article :
An intelligent supervisory system for ion implantation in IC fabrication processes
Author/Authors :
Li-Cheng Shen and Pau-Lo Hsu، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Keywords :
Feature extraction , symptom analysis , Supervision , Fuzzy expert systems , Ion implantation , beam maps
Journal title :
Electric Power Systems Research
Journal title :
Electric Power Systems Research
