Title of article :
Implicit linear control law of a close-spaced vapor transport process
Author/Authors :
M. Bonilla Estrada، نويسنده , , V. Rejon and R. Castro-Rodriguez، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2000
Keywords :
Thin "lms semiconductors , Temperature process , Implicit systems , CSVT , PI controllers , Modeling and control of semiconductor process RTP
Journal title :
Electric Power Systems Research
Journal title :
Electric Power Systems Research
