Title of article :
Multivariable feedback control design for high-precision wafer stage motion
Author/Authors :
Marc van de Wal، نويسنده , , Gregor van Baars، نويسنده , , Frank Sperling and Okko Bosgra، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2002
Pages :
17
From page :
739
To page :
755
Keywords :
HN-control , Servo systems , Multivariable control , m-Synthesis , Motion control , Model uncertainty , mechatronics , Control design , feedback control
Journal title :
Electric Power Systems Research
Serial Year :
2002
Journal title :
Electric Power Systems Research
Record number :
372981
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=372981
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