Title of article
On control of resist film uniformity in the microlithography process
Author/Authors
Weng Khuen Ho، نويسنده , , Arthur Tay، نويسنده , , Lay Lay Lee and Charles D. Schaper، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
12
From page
881
To page
892
Keywords
Temperature Control , semiconductor manufacturing , Photoresist processing , Generalized predictive control
Journal title
Electric Power Systems Research
Serial Year
2004
Journal title
Electric Power Systems Research
Record number
373265
Link To Document