Title of article
Run-to-run control and performance monitoring of overlay in semiconductor manufacturing
Author/Authors
C. A. Bode، نويسنده , , B. S. Ko and T. F. Edgar، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
8
From page
893
To page
900
Keywords
Microelectronics manufacturing , lithography , Model predictive control , Controller performance monitoring , Overlay
Journal title
Electric Power Systems Research
Serial Year
2004
Journal title
Electric Power Systems Research
Record number
373266
Link To Document