Title of article :
LPV control for a wafer stage: beyond the theoretical solution
Author/Authors :
Matthijs Groot Wassink، نويسنده , , Marc van de Wal، نويسنده , , Carsten Scherer and Okko Bosgra، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
15
From page :
231
To page :
245
Keywords :
LPV synthesis , Servo systems , Motion control , mechatronics , Position-dependent dynamics , Gain scheduling , LPV modeling , feedback control
Journal title :
Electric Power Systems Research
Serial Year :
2005
Journal title :
Electric Power Systems Research
Record number :
373342
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=373342
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