Title of article :
Low dielectric constant polymers for microelectronics
Author/Authors :
G. Maier ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Pages :
63
From page :
3
To page :
65
Keywords :
dielectric constant , Interlayer dielectric , Intermetal dielectric , Low-e-dielectrics , Low-e polymer , Low-k polymer , Polymers for microelectronics
Journal title :
Progress in Polymer Science
Serial Year :
2001
Journal title :
Progress in Polymer Science
Record number :
390746
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=390746
