Title of article
Polysilanes for semiconductor fabrication
Author/Authors
Shuzi Hayase، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
23
From page
359
To page
381
Keywords
lithography , Resist , bilayer , Amplification , Benzophenone , Electron transfer , Anti-reflection , Patterntransfer , Photo-reactivity , Polysilane
Journal title
Progress in Polymer Science
Serial Year
2003
Journal title
Progress in Polymer Science
Record number
390840
Link To Document