Title of article
Timed Petri nets in modeling and analysis of cluster tools
Author/Authors
Zuberek، نويسنده , , W.M.، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 2001
Pages
14
From page
562
To page
575
Keywords
Performanceanalysis , Cluster tools , place invariants , structuralanalysis , transient behavior. , Timed Petri nets , net transformations , steady-state behavior
Journal title
I E E E Transactions on Robotics and Automation
Serial Year
2001
Journal title
I E E E Transactions on Robotics and Automation
Record number
391591
Link To Document