Title of article :
Application of neural fuzzy network to pyrometer correction and temperature control in rapid thermal processing
Author/Authors :
Jiun-Hong Lai، نويسنده , , Chin-Teng Lin، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Keywords :
emissivity , feedforward learning , inverse control , TSK fuzzy rules , wafer. , temperature measurement
Journal title :
IEEE TRANSACTIONS ON FUZZY SYSTEMS
Journal title :
IEEE TRANSACTIONS ON FUZZY SYSTEMS
