SOI: a metamorphosis of silicon

For the next millennium, SOI offers the opportunity to integrate high-performance and/or innovative devices that can push away the present frontiers of the CMOS down-scaling. SOI will play a significant role in the future of microelectronics if subsisting problems can be rapidly solved. The short-term prospects of SOI-based microelectronics will also closely depend on the penetration rate of LP/LV SOI circuits into the market, A key challenge is associated with the industrial strategy, which must be oriented to overcome the bulk-Si monocultural barrier. Designers, process engineers, and managers are extremely busy loading the bulk-Si machine. When, eventually, they can afford to take a careful look at the assets of SOI technology, they do realize the immediate and long-term benefits offered in terms of performance and scaling extensions. Several companies have already accomplished this step; others will follow soon. SOI should not be regarded as a totally different technology. It is just a metamorphosis of silicon