Title of article :
MEMS: micro technology, mega impact
Author/Authors :
Nagel، نويسنده , , D.J.، نويسنده , , Zaghloul، نويسنده , , M.E.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Abstract :
The variety and applications of microelectromechanical systems (MEMS) devices have increased dramatically, improving existing uses or enabling entirely new ones. This article surveys some of the current and projected applications of MEMS
Journal title :
IEEE Circuits and Devices Magazine
Journal title :
IEEE Circuits and Devices Magazine
