Title of article :
Is there light at the end of the road for optical lithography?
Author/Authors :
Levinson، نويسنده , , H.J.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2002
Abstract :
As optical lithography nears its physical limits, this article discusses the 2001 ITRS update to the lithography roadmap and reviews the possible next-generation lithography technologies outlined in that update.
Journal title :
IEEE Circuits and Devices Magazine
Journal title :
IEEE Circuits and Devices Magazine
