Title of article
Nanometer-scale pattern registration and alignment by directed diblock copolymer self-assembly
Author/Authors
Black، نويسنده , , C.T.، نويسنده , , Bezencenet، نويسنده , , O، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
4
From page
412
To page
415
Keywords
semiconductor device fabrication. , Lithography , Nanotechnology , selfassembly , Polymers
Journal title
IEEE Transactions on Nanotechnology
Serial Year
2004
Journal title
IEEE Transactions on Nanotechnology
Record number
398440
Link To Document