Title of article :
Nanometer-scale pattern registration and alignment by directed diblock copolymer self-assembly
Author/Authors :
Black، نويسنده , , C.T.، نويسنده , , Bezencenet، نويسنده , , O، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Pages :
4
From page :
412
To page :
415
Keywords :
semiconductor device fabrication. , Lithography , Nanotechnology , selfassembly , Polymers
Journal title :
IEEE Transactions on Nanotechnology
Serial Year :
2004
Journal title :
IEEE Transactions on Nanotechnology
Record number :
398440
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=398440
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