A study on the energy performance of a cooling plant system: Air-conditioning in a semiconductor factory

This paper will focus on the energy performance evaluation of a cooling plant system in a semiconductor factory. Several energy saving technologies namely: integrated cooling towers, free cooling systems, control of the chilled water quantity, etc., have been adopted to improve efficiency of the cooling plant system. We have collected actual operating data for 2 years and evaluated the performance of chillers’ COP and the whole cooling plant systemʹs COP and they showed satisfactory results even if the thermal load of the factory was about half compared with design phase assumption.