An investigation into a piezoelectrically actuated nebulizer with μEDM-made micronozzle array

This study uses micromachining techniques to fabricate a piezoelectrically actuated nebulizer with an easily assembled structure. The experimental measurement and numerical simulation have been performed to gain the insight of atomized droplet behavior and fluidic mechanics for the developed devices. It is expected that a better understanding of these physical insights can lead to various potential applications. Based on the results obtained from a series of investigations, this study has found the optimal operating conditions for the proposed nebulizer. Various test fluids with different viscosities and surface tensions are considered, including water, dilute alcohol, oil, and a honey-like fluid. A spray stability analysis is performed in which the operating voltage and frequency of the piezoelectric actuator in the nebulizer are varied and the corresponding changes in the ejected particle size, flow rate and ejection distance examined. Air trapped within the nebulizer reservoir adversely affects the injection performance. Hence, the effect of the operating parameters on the volume of air ingested into the reservoir during the nebulizer operation is investigated and discussed.