Title of article :
On the evaluation of damping in MEMS in the slip-flow regime
Author/Authors :
A. Frangi، نويسنده , , G. Spinola، نويسنده , , S. Lorenzani and B. Vigna، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2006
Abstract :
The analysis of fluid damping in micro-electro-mechanical systems (MEMS) is addressed. A mixed
fast multipole boundary element method based on both velocity and traction integral equations is
employed and adapted in order to account for slip boundary conditions. The formulation presented is
applied to the analysis of a biaxial accelerometer and validated with experimental results. Copyright
2006 John Wiley & Sons, Ltd
Keywords :
BEM , fast multipole methods , Damping , MEMS
Journal title :
International Journal for Numerical Methods in Engineering
Journal title :
International Journal for Numerical Methods in Engineering
