Thermal Conductivity Measurements of Thin Amorphous Silicon Films by Scanning Thermal Microscopy

Thermal conductivity measurements of thin amorphous silicon films performed with a micro-thermistance mouInted on an atomic force microscope are preseInted. A specific thermal model is implemeInted, and an identification procedure is proposed to extract the film contribution from the apparent thermal conductivity. Results show agreement with the literature regarding iInterface resistance data, but lower thermal conductivity values are obtained.