Title of article :
A Design Flow for Micromachined Electromechanical Systems
Author/Authors :
Nicholas R. Swart، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Abstract :
I present a design flow for integrated microelectromechanical systems (MEMS), with particular focus on electromechanical devices. Several design examples of real-world devices are given
Journal title :
IEEE Design and Test of Computers
Journal title :
IEEE Design and Test of Computers
