• Title of article

    Using Atomic Force Microscopy for Deep-Submicron Failure Analysis

  • Author/Authors

    Jien-Chung Lo، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2001
  • Pages
    9
  • From page
    10
  • To page
    18
  • Abstract
    As circuit feature size continues to shrink, we will soon need a failure analysis technique that provides resolutions of 10 nanometers or less. This feasibility study concludes that AFM technology, with reasonable improvements, can take over where focused ion beams leave off
  • Journal title
    IEEE Design and Test of Computers
  • Serial Year
    2001
  • Journal title
    IEEE Design and Test of Computers
  • Record number

    431314

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=431314