Author/Authors :
Federico Di Palma، نويسنده , , University of Pavia
Giuseppe De Nicolao، نويسنده , , University of Pavia
Guido Miraglia، نويسنده , , STMicroelectronics
Oliver M. Donzelli، نويسنده , , STMicroelectronics
، نويسنده ,
Abstract :
Early detection of faulty process steps through process diagnosis is critical to the semiconductor industry. The AC-ID methodology can isolate the root causes of yield loss by combining end-of-line tests with process history information. The ACID software tool automates this methodology and is fully operational at several industry production sites.
