• Title of article

    ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis

  • Author/Authors

    Federico Di Palma، نويسنده , , University of Pavia Giuseppe De Nicolao، نويسنده , , University of Pavia Guido Miraglia، نويسنده , , STMicroelectronics Oliver M. Donzelli، نويسنده , , STMicroelectronics ، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2007
  • Pages
    10
  • From page
    352
  • To page
    361
  • Abstract
    Early detection of faulty process steps through process diagnosis is critical to the semiconductor industry. The AC-ID methodology can isolate the root causes of yield loss by combining end-of-line tests with process history information. The ACID software tool automates this methodology and is fully operational at several industry production sites.
  • Journal title
    IEEE Design and Test of Computers
  • Serial Year
    2007
  • Journal title
    IEEE Design and Test of Computers
  • Record number

    431756

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=431756