Fabrication of LiMn2O4 thin films by sol–gel method for cathode materials of microbattery

LiMn2O4 thin films have received considerable attention as cathode materials for thin-film microbatteries. In this work, LiMn2O4 thin films are prepared by a sol–gel method using a spin coator. The precursor powder is investigated by TG–DTA and mass spectroscopy analysis in order to study the decomposition process prior to deposition. The coated films are dried at 310 to 360°C, and annealed at 700 to 800°C to obtain a spinel structure. Films annealed under appropriate conditions exhibit good crystallinity, smooth surface morphology, high capacity, and good rechargeability. This film is therefore suitable for use as a cathode for thin-film microbatteries.