Transparent Conducting ZnO:Al Films on Different Organic Substrates Deposited by r.f. Sputtering

Transparent conducting ZnO:AI films with good adhesion, low resistivity and high transmittance have been prepared on polyptopylene adipate (PPA), polyisocyanate (PI) and polyester substrates by r.f. magnetron sputtering. The structural, electrical and optical properties of the obtained films were studied. The polycrystalline ZnO:AI films with resistivity as low as 5.76*10^-4(omega).cm, carrier concentration 9.06*10^20 cm^-3 and Hail mobility 11.98 cm^2 V^-1s^-1 were produced on PPA substrate by controlling the deposition parameters. The average transmittance of films on PPA is ~80% in the wavelength range of visible spectrum. The films on PPA substrates have better electrical and optical properties compared with the films on other kinds of substrates.