Ion chanelling

Since the first channelling experiments were performed in 1963 by Davies and his co-workers the technique has been combined with many methods like Rutherford backscattering spectrometry, particle induced x-ray emission and on-line nuclear reaction to localize trace elements in crystals or to determine crystalline quality. The ratios of channelled to random stopping powers of silicon for irradiation in the left angle bracket10right-pointing angle bracket direction have been investigated and compared to the available theoretical results. We shall describe some applications of ion channelling in the field of materials characterization. Special attention is given to ion channelling combined with charged particle activation analysis for studying the behaviour of oxygen atoms in Czochralski-grown silicon lattices.