Multilayered BN Coatings Processed by a Continuous LPCVD Treatment onto Hi-Nicalon Fibers

Boron nitride coatings were deposited onto SiC fibers by means of continuous low-pressure chemical vapor deposition (LPCVD) treatment from BF3/NH3 mixtures. This process lies in unrolling the fiber in the reactor axis. The relationships between the processing parameters and the structure of the BN deposits are presented. Thanks to a temperature gradient present in the reactor, multilayered BN films can be performed by stacking successive isotropic and anisotropic sublayers. Tensile tests show that when the temperature profile is well adapted, the SiC fibers are not damaged by the LPCVD treatment.