Fabrication of SrRuO3 powders and thin films by metalorganic decomposition

Pure SrRuO3 powders and thin films were obtained using sol-gel synthesis from mixtures of strontium acetylacetonate and ruthenium nitrosylnitrate in 2-methoxyethanol. Fast firing conditions of xerogel (20-600°C, 600°C min-1 and then 600-800°C, 5°C min-1) lead to the crystallisation of pure SrRuO3 powder. SrRuO3 thin films were prepared by spin-coating a stable precursor solution onto (111)Si wafers and (001)SrTiO3 single crystals. Whereas they show random orientation on Si wafers, the films are strongly (110) oriented when deposited on (001)SrTiO3.