Fluorinated Aminoalkoxide and Ketoiminate Indium Complexes as MOCVD Precursors for In2O3 Thin Film Deposition

The syntheses of two distinctive types of indium complex derived from trimethylindium (InMe3) are reported. The first kind has a generalized structural formula [InMe2(amak)]2, where (amak)H is an abbreviation for a series of chelating amino alcohol ligands HOC(CF3)2CH2NHR, R = (CH2)2OMe (1), Me (2), and But (3), as well as HOC(CF3)2CH2NMe2 (4); while the second type of complex is illustrated by [InMe2(keim)] (5), for which (keim)H is a tridentate ketoimine ligand of structural formula O=C(CF3)CH2C(CF3)=NCH2CH2NMe2. The solid-state structures of 2 and 5 were determined using single crystal X-ray diffraction studies. For the aminoalkoxide complexes 2-4, the existence of dimeric In2O2 core structures in the solid state has been established with the amino fragment located trans to the alkoxide ligands, in a molecular arrangement which is in contrast to the distorted, trigonal bipyramidal geometry observed for the ketoiminate complex 5.