Designing a Robust MEMS AC Voltage Reference Source Using Artificial Neural Network

This paper proposed a new simple harmonic oscillator. It uses artificial neural network as a robust compensator. Artificial neural network decreases temperature efect. The neural network (NN) uses Levenberg-Marquardt (LM) method for training the system to have more accurate response. An electronic circuit is described in which the pull-in voltage of capacitive microelectromechanical system (MEMS) devices is applied as a reference for a stable alternating voltage source at frequencies between 5 kHz and 100 kHz. The simulation results are very promising