Analytical Solution for Nnonlinear Vibration of Micro-Electro mechanical System (MEMS) by Frequency-Amplitude FormulationMethod

In this paper, one analytical technique named Frequency-Amplitude Formulation Method (FAF) isused to obtain the behavior and frequency of theelectrostatically actuated microbeams. The main aim of the work is obtaining highly accurate analytical solution for nonlinear free vibration of a microbeam and investigates the dynamic behavior of the system. Results reveal that the nonlinear frequency of oscillatory system remarkably affected with the initial conditions. In contrast to the time marching solution results, the present analytical method is effective and convenient. It is predictable that the FAF can apply for various problems in engineering specially vibration equations.